SYNTHESIS OF HIGHLY ORIENTED LEAD ZIRCONATE LEAD TITANATE FILM USING METALLOORGANICS

被引：79

作者：

HIRANO, S

YOGO, T

KIKUTA, K

ARAKI, Y

SAITOH, M

OGASAHARA, S

机构：

[1] Department of Applied Chemistry, School of Engineering, Nagoya University, Nagoya

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1992年 / 75卷 / 10期

关键词：

D O I：

10.1111/j.1151-2916.1992.tb05505.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Crack-free Pb(Zr,Ti)O3 (PZT) thin films with preferred orientation were prepared successfully on MgO (100), SrTiO3 (100), and Pt/Ti/SiO2/Si substrates from metal alkoxide solutions. Calcination of precursor films in a H2O-O2 gas mixture was found to be effective not only for low-temperature crystallization of perovskite PZT, but also for obtaining the preferred orientation of PZT films. Single-phase PZT films with.high preferred orientation were synthesized on MgO (100) and Pt/Ti/SiO2/Si substrates at 550-degrees and 600-degrees-C for 2 h, respectively. The PZT film on the Pt/Ti/SiO2/Si substrate showed a permittivity of 520, tan delta of 0.03, a remanent polarization of 24 muC/cm2, and a coercive field of 54 kV/cm.

引用

页码：2785 / 2789

页数：5

共 17 条

[1] SPUTTER-DEPOSITION OF [111]-AXIS ORIENTED RHOMBOHEDRAL PZT FILMS AND THEIR DIELECTRIC, FERROELECTRIC AND PYROELECTRIC PROPERTIES [J].