TRANSMISSION SPUTTERING OF THIN FILMS BY LOW-ENERGY HYDROGEN IONS

被引：9
作者：
ROBISON, CH
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 07期
关键词：
D O I：
10.1063/1.1656794
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3441 / &
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