AUTOMATIC OPTICAL SENSOR FOR THICKNESS CONTROL OF THIN TRANSPARENT FILMS

被引：1

作者：

GONZALEZCANO, A ^{[1
]}

BERNABEU, E ^{[1
]}

机构：

[1] UNIV COMPLUTENSE MADRID,FAC CIENCIAS FIS,DEPT OPT,E-28040 MADRID,SPAIN

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80096-Y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An optical sensor for automatic control of the thickness of transparent films in the range 10-100 mum is presented. It is based on light interference produced by multiple internal reflections within the film. The optics involved is quite simple and the data analysis is fully computerized. It incorporates a compact and simple theoretical treatment of the interference phenomenon, and fringe-spacing measurement by a zero-crossing algorithm. It provides real-time, on-production-line control and it is cheap and accurate enough for industrial requirements.

引用

页码：561 / 564

页数：4