IMPURITY DIFFUSION IN POROUS SILICON FORMED BY ANODIC REACTION

被引：10

作者：

YAMANAKA, H ^{[1
]}

KAMOSHIDA, M ^{[1
]}

HANETA, Y ^{[1
]}

机构：

[1] NIPPON ELECT CO LTD, IC DIV, 1753 SHIMONUMABE, KAWASAKI, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年 / 13卷 / 10期

关键词：

D O I：

10.1143/JJAP.13.1661

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1661 / 1662

页数：2

相关论文

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[3] ELECTROPOLISHING SILICON IN HYDROFLUORIC ACID SOLUTIONS
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