INFLUENCE OF STRESS ON THE PHOTOLUMINESCENCE OF POROUS SILICON STRUCTURES

被引:66
作者
FRIEDERSDORF, LE
SEARSON, PC
PROKES, SM
GLEMBOCKI, OJ
MACAULAY, JM
机构
[1] USN,RES LAB,WASHINGTON,DC 20375
[2] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.107056
中图分类号
O59 [应用物理学];
学科分类号
摘要
The blueshifting of photoluminescence spectra of porous silicon structures formed in p-type silicon is shown to be related to stresses in the porous material. A characteristic cellular structure, with varying length scale, is observed in the high porosity films due to high surface stresses. The cellular structure is not formed during the secondary open-circuit etching procedure itself but occurs during evaporation of the electrolyte after removal of the porous silicon from the etching solution.
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收藏
页码:2285 / 2287
页数:3
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