THEORETICAL ANALYSIS OF ENERGY-SPECTRA OF BACKSCATTERED IONS

被引：47

作者：

BRICE, DK ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

THIN SOLID FILMS | 1973年 / 19卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90029-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：121 / 135

页数：15

共 13 条

[1]

BOHR N, 1948, KGL DANSKE VIDEN MFM, V18

[2]

BORDERS JA, UNPUBLISHED DATA

[3]

BRICE DK, 1971, RADIAT EFF, V11, P227

[4] ESTIMATION OF IMPURITY PROFILES IN ION-IMPLANTED AMORPHOUS TARGETS USING JOINED HALF-GAUSSIAN DISTRIBUTIONS [J].

GIBBONS, JF ;

MYLROIE, S .

APPLIED PHYSICS LETTERS, 1973, 22 (11) :568-569

[5]

GIBBONS JF, 1972, PERSONAL COMMUNICATI

[6]

Mayer J. W., 1970, ION IMPLANTATION SEM

[7] PROFILING OF PERIODIC STRUCTURES (GAAS-GAAIAS) BY NUCLEAR BACKSCATTERING [J].

MAYER, JW ;

ZIEGLER, JF ;

CHANG, LL ;

TSU, R ;

ESAKI, L .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) :2322-2325

[8] RANGE OF HEAVY IONS IN SOLIDS [J].

POWERS, D ;

WHALING, W .

PHYSICAL REVIEW, 1962, 126 (01) :61-&

[9]

SIRITONIN EI, 1971, VESTN MOSK U FIZ AST, V12, P541

[10] SPATIAL DISTRIBUTION OF ENERGY DEPOSITED BY ENERGETIC HEAVEY IONS IN SEMICONDUCTORS [J].

TSURUSHIMA, T ;

TANOUE, H .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1971, 31 (06) :1695-+

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