ELECTRICAL-CONDUCTION IN THE SI(111)-B-(SQUARE-ROOT-3 X SQUARE-ROOT-3)R 30-DEGREES/ALPHA-SI INTERFACE RECONSTRUCTION

被引:20
作者
HEADRICK, RL
LEVI, AFJ
LUFTMAN, HS
KOVALCHICK, J
FELDMAN, LC
机构
来源
PHYSICAL REVIEW B | 1991年 / 43卷 / 18期
关键词
D O I
10.1103/PhysRevB.43.14711
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
One-third of a monolayer of spatially ordered boron on (111)-oriented crystalline silicon is prepared in ultrahigh vacuum and then buried under a thin layer of amorphous silicon. This leaves a two-dimensional (square-root 3 x square-root 3) boron layer in substitutional sites confined to a single monolayer on the crystalline side of the interface. We report electrical conductivity with a high p-type carrier density (> 10(14)/cm2) in an ordered two-dimensional interface layer.
引用
收藏
页码:14711 / 14714
页数:4
相关论文
共 20 条
[11]   PROBING VALENCE STATES WITH PHOTOEMISSION AND INVERSE PHOTOEMISSION [J].
HIMPSEL, FJ ;
FAUSTER, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :815-821
[12]   EFFECT OF SURFACE RECONSTRUCTION ON STABILITY AND REACTIVITY OF SI CLUSTERS [J].
KAXIRAS, E .
PHYSICAL REVIEW LETTERS, 1990, 64 (05) :551-554
[13]   NONRANDOM DOPING AND ELASTIC-SCATTERING OF CARRIERS IN SEMICONDUCTORS [J].
LEVI, AFJ ;
MCCALL, SL ;
PLATZMAN, PM .
APPLIED PHYSICS LETTERS, 1989, 54 (10) :940-942
[14]   ADSORPTION OF BORON ON SI(111) - ITS EFFECT ON SURFACE ELECTRONIC STATES AND RECONSTRUCTION [J].
LYO, IW ;
KAXIRAS, E ;
AVOURIS, P .
PHYSICAL REVIEW LETTERS, 1989, 63 (12) :1261-1264
[15]   MODELING OF CARRIER MOBILITY AGAINST CARRIER CONCENTRATION IN ARSENIC-DOPED, PHOSPHORUS-DOPED, AND BORON-DOPED SILICON [J].
MASETTI, G ;
SEVERI, M ;
SOLMI, S .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (07) :764-769
[16]   ORDERING AT SI(111)/A-SI AND SI(111)/SIO2 INTERFACES [J].
ROBINSON, IK ;
WASKIEWICZ, WK ;
TUNG, RT ;
BOHR, J .
PHYSICAL REVIEW LETTERS, 1986, 57 (21) :2714-2717
[17]   ELECTRON-MOBILITY ENHANCEMENT AND ELECTRON-CONCENTRATION ENHANCEMENT IN DELTA-DOPED N-GAAS AT T=300K [J].
SCHUBERT, EF ;
CUNNINGHAM, JE ;
TSANG, WT .
SOLID STATE COMMUNICATIONS, 1987, 63 (07) :591-594
[18]  
Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103
[19]  
SEEGER K, 1982, SEMICONDUCTOR PHYSIC
[20]   ETCHING OF SIO2-FILMS BY SI IN ULTRAHIGH-VACUUM [J].
TABE, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (03) :534-538