THE EFFECT OF ION-IMPLANTATION ON THE SUBSTRUCTURE OF METAL-FILMS

The effect of ion implantation of phosphorus into nickel films and that of nitrogen into aluminium films on the substructure parameters is studied. It is shown that the change in the size of blocks L and in microstrains ϵ with dose is nonmonotonic: the initial stage of decrease in L and increase in ϵ is followed by the stage with an opposite change in these parameters. The grain size in nickel films monotonically increases with dose and saturates when approaching the film thickness. The influence of the microstrain variation in aluminium films on the kinetics of the AlN phase formation is observed. A qualitative explanation of the data obtained is proposed. Copyright © 1990 WILEY‐VCH Verlag GmbH & Co. KGaA