THERMAL-ANALYSIS OF TARGET SURFACE IN THE BA-Y-CU-O FILM PREPARATION BY LASER ABLATION METHOD

被引：55

作者：

OTSUBO, S ^{[1
]}

MINAMIKAWA, T ^{[1
]}

YONEZAWA, Y ^{[1
]}

MORIMOTO, A ^{[1
]}

SHIMIZU, T ^{[1
]}

机构：

[1] IND RES INST ISHIKAWA PREFECTURE,KANAZAWA 92002,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 01期

关键词：

Ba-Y-Cu-O thin film; Excimer laser ablation; Explosive removal; Numerical analysis; Temperature distribution of target;

D O I：

10.1143/JJAP.29.L73

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

For clarifying the mechanism of material removal from the surface of Ba-Y-Cu-O by a high-intensity pulsed laser beam, a transient temperature distribution was calculated, and the obtained results were compared with the experimental ones. The calculated values well explain the experimental results such as a threshold of the Ba-Y-Cu-O evaporation. It was found that the subsurface temperature exceeds the front surface temperature. Under such conditions, an explosive removal of material can occur resulting in very rapid material removal with no compositional deviation between the target and the deposited film. © 1990 IOP Publishing Ltd.

引用

页码：L73 / L76

页数：4

共 22 条

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