PROTECTIVE CVD COATINGS FOR THE TOOL INDUSTRY - REQUIREMENTS FOR PROCESS-CONTROL AND EQUIPMENT

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作者：
MOHN, E
BONETTI, R
WIPRACHTIGER, H
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JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
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10.1051/jphyscol:1989598
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页码：811 / 819
页数：9
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