PROTECTIVE CVD COATINGS FOR THE TOOL INDUSTRY - REQUIREMENTS FOR PROCESS-CONTROL AND EQUIPMENT

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作者：

MOHN, E

BONETTI, R

WIPRACHTIGER, H

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JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期

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D O I：

10.1051/jphyscol:1989598

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页码：811 / 819

页数：9

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