EMISSION-SPECTROSCOPY OF THE PLASMA DECOMPOSITION OF SILICON TETRACHLORIDE

被引：8

作者：

ROWE, MD

机构：

来源：

JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS II | 1988年 / 84卷

关键词：

D O I：

10.1039/f29888400191

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：191 / 197

页数：7

共 17 条

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