EVAPORATION SOURCE FOR DEPOSITION OF PROTECTIVE LAYERS INSIDE TUBES

被引：3

作者：

MUSA, G

MUSTATA, I

DINESCU, G

BAJEU, G

RAICIU, E

机构：

[1] Institute of Physics and Technology of Radiation Devices, Bucharest, Magurele

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 9A期

关键词：

EVAPORATION SOURCE; ARC DISCHARGE; METAL VAPOR; PROTECTIVE LAYERS; VAPORS DEPOSITION;

D O I：

10.1143/JJAP.31.2869

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A heated cathode arc can be ignited in vacuum in the vapours of the anode material due to the accelerated electron beam from the cathode. A small assembly, consisting of an electron gun as the cathode and a refractory metal crucible, containing the material to be evaporated, as the anode, can be moved along the axis of the tube whose inside wall is to be covered with a protective layer. The vacuum arc ignited between the electrodes in the vapours of the evaporating anode material ensures a high deposition rate with low thermal energy transport to the tube wall. This new method can be used for the deposition of various metal layers inside different kinds of tubes (metallic, glass, ceramics or plastics).

引用

页码：2869 / 2871

页数：3

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