HIGH-ASPECT-RATIO RESIST PATTERN FABRICATION BY ALKALINE SURFACE-TREATMENT

被引：2
|
作者：
ENDO, M
SASAGO, M
MATSUOKA, K
NOMURA, N
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期
关键词：
D O I：
10.1116/1.584597
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1076 / 1079
页数：4
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