AN XPS STUDY OF THE INITIAL-STAGES OF OXIDATION OF HAFNIUM

被引：128
作者：
MORANT, C
GALAN, L
SANZ, JM
机构：
[1] Departamento de Física Aplicada, Universidad Autónoma de Madrid, Madrid
来源：
SURFACE AND INTERFACE ANALYSIS | 1990年 / 16卷 / 1-12期
关键词：
D O I：
10.1002/sia.740160163
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The oxidation kinetics of polycrystalline hafnium (Hf) at room temperature and low oxygen pressure (Po2 ∼ 10−7 Torr) has been studied by x‐ray photoelectron spectroscopy (XPS). After a chemisorption stage for exposures ⩽ 5 L, Hf suboxides are initially formed and are dominant until ∼ 25 L. HfO2 appears at ∼ 10 L. Above 25 L, HfO2 grows by oxidation of the suboxides, whereas the oxide film thickness remains constant. Above 500 L, a saturation region is observed that corresponds to an oxide layer of 12 Å thick with an average composition HfO1.8. Copyright © 1990 John Wiley & Sons Ltd.
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页码：304 / 308
页数：5
相关论文
共 22 条
[11]   XPS STUDY OF THE ROOM-TEMPERATURE SURFACE OXIDATION OF ZIRCONIUM AND ITS BINARY-ALLOYS WITH TIN, CHROMIUM AND IRON [J].
KUMAR, L ;
SARMA, DD ;
KRUMMACHER, S .
APPLIED SURFACE SCIENCE, 1988, 32 (03) :309-319
[12]   AN XPS STUDY OF THE INTERACTION OF OXYGEN WITH ZIRCONIUM [J].
MORANT, C ;
SANZ, JM ;
GALAN, L ;
SORIANO, L ;
RUEDA, F .
SURFACE SCIENCE, 1989, 218 (2-3) :331-345
[13]   SMOOTHING OF DIGITAL X-RAY PHOTOELECTRON-SPECTRA BY AN EXTENDED SLIDING LEAST-SQUARES APPROACH [J].
PROCTOR, A ;
SHERWOOD, PMA .
ANALYTICAL CHEMISTRY, 1980, 52 (14) :2315-2321
[14]   SMOOTHING + DIFFERENTIATION OF DATA BY SIMPLIFIED LEAST SQUARES PROCEDURES [J].
SAVITZKY, A ;
GOLAY, MJE .
ANALYTICAL CHEMISTRY, 1964, 36 (08) :1627-&
[15]  
Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103
[16]   AN ELECTRON SPECTROSCOPIC STUDY OF THE SURFACE OXIDATION OF GLASSY AND CRYSTALLINE CU-ZR ALLOYS [J].
SEN, P ;
SARMA, DD ;
BUDHANI, RC ;
CHOPRA, KL ;
RAO, CNR .
JOURNAL OF PHYSICS F-METAL PHYSICS, 1984, 14 (02) :565-577
[17]  
SHERWOOD PMA, 1983, PRACTICAL SURFACE AN
[18]   HIGH-RESOLUTION X-RAY PHOTOEMISSION SPECTRUM OF VALENCE BANDS OF GOLD [J].
SHIRLEY, DA .
PHYSICAL REVIEW B, 1972, 5 (12) :4709-&
[19]   OXIDATION OF ZR AND THIN (0.2-4NM) ZR FILMS ON AG - AN ESCA INVESTIGATION [J].
STEINER, P ;
SANDER, I ;
SIEGWART, B ;
HUFNER, S .
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1987, 329 (2-3) :272-277
[20]   XPS VALENCE BAND SPECTRA OF HF METAL AND HFCXNYOZ COMPOUNDS AND THE CORRELATION TO THEIR SUPERCONDUCTIVITY [J].
STEINER, P ;
HOCHST, H ;
SCHNEIDER, J ;
HUFNER, S ;
POLITIS, C .
ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1979, 33 (03) :241-250
123