AN XPS STUDY OF THE INITIAL-STAGES OF OXIDATION OF HAFNIUM

被引：127
作者：
MORANT, C
GALAN, L
SANZ, JM
机构：
[1] Departamento de Física Aplicada, Universidad Autónoma de Madrid, Madrid
来源：
SURFACE AND INTERFACE ANALYSIS | 1990年 / 16卷 / 1-12期
关键词：
D O I：
10.1002/sia.740160163
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The oxidation kinetics of polycrystalline hafnium (Hf) at room temperature and low oxygen pressure (Po2 ∼ 10−7 Torr) has been studied by x‐ray photoelectron spectroscopy (XPS). After a chemisorption stage for exposures ⩽ 5 L, Hf suboxides are initially formed and are dominant until ∼ 25 L. HfO2 appears at ∼ 10 L. Above 25 L, HfO2 grows by oxidation of the suboxides, whereas the oxide film thickness remains constant. Above 500 L, a saturation region is observed that corresponds to an oxide layer of 12 Å thick with an average composition HfO1.8. Copyright © 1990 John Wiley & Sons Ltd.
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页码：304 / 308
页数：5
相关论文
共 22 条
[1]   TPD AND ESD STUDIES OF THE INTERACTION OF HYDROGEN AND OXYGEN ON POLYCRYSTALLINE ZIRCONIUM [J].
ASBURY, DA ;
HOFLUND, GB ;
PETERSON, WJ ;
GILBERT, RE ;
OUTLAW, RA .
SURFACE SCIENCE, 1987, 185 (1-2) :213-226
[2]   APPLICATION OF FOURIER-TRANSFORM TECHNIQUES TO PROBLEM OF DECONVOLUTION IN PHOTOELECTRON-SPECTROSCOPY [J].
BEATHAM, N ;
ORCHARD, AF .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 9 (02) :129-148
[3]   PRACTICAL PEAK AREA MEASUREMENTS IN X-RAY PHOTO-ELECTRON SPECTROSCOPY [J].
BISHOP, HE .
SURFACE AND INTERFACE ANALYSIS, 1981, 3 (06) :272-274
[4]   THE IDENTIFICATION AND CHARACTERIZATION OF MIXED OXIDATION-STATES AT OXIDIZED TITANIUM SURFACES BY ANALYSIS OF X-RAY PHOTOELECTRON-SPECTRA [J].
CARLEY, AF ;
CHALKER, PR ;
RIVIERE, JC ;
ROBERTS, MW .
JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1987, 83 :351-370
[5]   AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF THE SURFACE OXIDATION OF ZIRCONIUM [J].
DEGONZALEZ, CO ;
GARCIA, EA .
SURFACE SCIENCE, 1988, 193 (03) :305-320
[6]  
DIXON WJ, 1983, BMDP STATISTICAL SOF, P289
[7]  
FROMM E, 1977, 7TH P INT VAC C 3RD, V2, P889
[8]  
GALAN LD, IN PRESS
[9]   AN INVESTIGATION OF THE INTERACTION OF POLYCRYSTALLINE ZIRCONIUM WITH O2, N2, CO AND N2O .2. PRETREATMENT EFFECTS ON O2 CHEMISORPTION PROPERTIES [J].
HOFLUND, GB ;
ASBURY, DA ;
COX, DF ;
GILBERT, RE .
APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY) :252-258
[10]  
Hofmann S., 1982, J TRACE MICROPROBE T, V1, P213
123