ANODIC OXIDE METAL-INSULATOR SEMICONDUCTOR STRUCTURES ON N-TYPE INSB

被引：0
作者：
CHEN, CW [1 ]
LILE, DL [1 ]
机构：
[1] COLORADO STATE UNIV,DEPT ELECT ENGN,FT COLLINS,CO 80523
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期
关键词：
D O I：
10.1116/1.584562
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1122 / 1125
页数：4
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