GATE BIAS POLARITY DEPENDENCE OF CHARGE TRAPPING AND TIME-DEPENDENT DIELECTRIC-BREAKDOWN IN NITRIDED AND REOXIDIZED NITRIDED OXIDES

被引:28
作者
WU, AT [1 ]
MURALI, V [1 ]
NULMAN, J [1 ]
TRIPLETT, B [1 ]
FRASER, DB [1 ]
GARNER, M [1 ]
机构
[1] AG ASSOCIATES,SUNNYVALE,CA 94089
关键词
D O I
10.1109/55.43094
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:443 / 445
页数:3
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