SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION

被引：86

作者：

EHRLICH, DJ

OSGOOD, RM

DEUTSCH, TF

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 11期

关键词：

D O I：

10.1063/1.92192

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：946 / 948

页数：3

共 9 条

[1] LASER CHEMICAL VAPOR-DEPOSITION OF METALS AND INSULATORS [J].

ALLEN, SD ;

BASS, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :431-431

[2] CHEMICAL VAPOR-DEPOSITION OF SILICON USING A CO2-LASER [J].

CHRISTENSEN, CP ;

LAKIN, KM .

APPLIED PHYSICS LETTERS, 1978, 32 (04) :254-256

[3] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J].

DEUTSCH, TF ;

EHRLICH, DJ ;

OSGOOD, RM .

APPLIED PHYSICS LETTERS, 1979, 35 (02) :175-177

[4] *LETUDE DE LA CONDENSATION DES JETS MOLECULAIRES AU MOYEN DE RADIOELEMENTS ARTIFICIELS [J].

DEVIENNE, FM .

JOURNAL DE PHYSIQUE ET LE RADIUM, 1952, 13 (02) :53-58

[5] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) :1233-1243

[6]

EHRLICH DJ, UNPUBLISHED

[7]

Maissel L.I., 1970, HDB THIN FILM TECHNO

[8] EFFECT OF BEAM TEMPERATURE ON HETEROGENEOUS NUCLEATION OF ZINC FROM VAPOR [J].

RUTH, V ;

MOAZED, KL ;

HIRTH, JP .

JOURNAL OF CHEMICAL PHYSICS, 1966, 44 (05) :2093-+

[9]

Sigsbee R.A., 1967, ADV COLLOID INTERFAC, V1, P335, DOI 10.1016/0001-8686(67)80007-1

← 1 →