GROWTH AND CHARACTERIZATION OF ALGAAS/GAAS QUANTUM-WELL STRUCTURES FOR THE FABRICATION OF LONG WAVELENGTH INFRARED DETECTORS

被引:6
|
作者
PASKA, ZF
ANDERSSON, JY
LUNDQVIST, L
OLSSON, COA
机构
[1] Swedish Institute of Microelectronics, S-164 21 Kista
关键词
D O I
10.1016/0022-0248(91)90568-P
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Infrared detectors based on AlGaAs/GaAs multi quantum wells operating close to background limitation have been fabricated by MOVPE. Since detector performance depends critically on quantum well parameters, a sensitive and preferably non-destructive characterization method is demanded for. X-ray diffraction corresponds to this criterion and may be utilized prior to detector processing. A characterization technique based on X-ray diffraction is compared with Fourier transform infrared spectroscopy and photoluminescence measurements and the consistency of these methods is thereby ascertained. Quantum well characteristics obtained in this manner are finally compared with actual detector performance.
引用
收藏
页码:845 / 849
页数:5
相关论文
共 50 条
  • [1] VERTICAL INTEGRATION OF A GAAS/ALGAAS QUANTUM-WELL LASER AND A LONG-WAVELENGTH QUANTUM-WELL INFRARED PHOTODETECTOR
    TSANG, JS
    LEE, CP
    TSAI, KL
    CHEN, HR
    ELECTRONICS LETTERS, 1994, 30 (05) : 450 - 451
  • [2] OMVPE GROWTH AND CHARACTERIZATION OF GAAS/ALGAAS QUANTUM-WELL DEVICE STRUCTURES
    VERMAAK, JS
    EHLERS, HL
    LEITCH, AWR
    RAUBENHEIMER, D
    SOUTH AFRICAN JOURNAL OF SCIENCE, 1991, 87 (3-4) : 121 - 123
  • [3] THE THEORY OF MULTIPLE QUANTUM-WELL GAAS-ALGAAS INFRARED DETECTORS
    SHADRIN, VD
    SERZHENKO, FL
    INFRARED PHYSICS, 1992, 33 (05): : 345 - 357
  • [4] GAAS/ALGAAS QUANTUM-WELL INFRARED DETECTORS WITH AN INTEGRAL SILICON GRATING
    CHI, GC
    JUANG, C
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (5A): : 2483 - 2486
  • [5] GAAS/ALGAAS QUANTUM-WELL INFRARED PHOTODETECTORS
    MIYATAKE, T
    HORIHATA, S
    EZAKI, T
    KUBO, H
    MORI, N
    TANIGUCHI, K
    HAMAGUCHI, C
    SOLID-STATE ELECTRONICS, 1994, 37 (4-6) : 1187 - 1190
  • [6] EFFICIENCY OF GRATING-COUPLED ALGAAS/GAAS QUANTUM-WELL INFRARED DETECTORS
    LUNDQVIST, L
    ANDERSSON, JY
    PASKA, ZF
    BORGLIND, J
    HAGA, D
    APPLIED PHYSICS LETTERS, 1993, 63 (24) : 3361 - 3363
  • [7] EXCESS TUNNEL CURRENTS IN ALGAAS/GAAS MULTIPLE QUANTUM-WELL INFRARED DETECTORS
    WILLIAMS, GM
    DEWAMES, RE
    FARLEY, CW
    ANDERSON, RJ
    APPLIED PHYSICS LETTERS, 1992, 60 (11) : 1324 - 1326
  • [8] Wavelength tuning of GaAs/AlGaAs quantum-well infrared photo-detectors by proton implantation induced intermixing
    Liu, XQ
    Li, N
    Lu, W
    Li, N
    Yuan, XZ
    Shen, SC
    Fu, L
    Tan, HH
    Jagadish, C
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (4A): : 1687 - 1689
  • [9] GAAS/ALGAAS QUANTUM-WELL INFRARED PHOTOCONDUCTORS VERSUS HGCDTE PHOTODIODES FOR LONG-WAVELENGTH INFRARED APPLICATIONS
    ROGALSKI, A
    JOZWIKOWSKI, K
    OPTICAL ENGINEERING, 1994, 33 (05) : 1477 - 1484
  • [10] Wavelength tuning of GaAs/AlGaAs quantum-well infrared photodetectors by thermal interdiffusion
    Liu, XQ
    Li, N
    Chen, XS
    Lu, W
    Xu, WL
    Yuan, XZ
    Li, N
    Shen, SC
    Yuan, S
    Tan, HH
    Jagadish, C
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9A): : 5044 - 5045