COMPUTER-SIMULATION ANALYSIS OF THE PLANAR CHANNELING EFFECT IN PRACTICAL ION-IMPLANTATION

被引：1

作者：

KIMURA, Y

KANG, HJ

SHIMIZU, R

机构：

[1] CHUNGBUK NATL UNIV,DEPT PHYS,CHEONGJU 310,SOUTH KOREA

[2] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1988年 / 27卷 / 03期

关键词：

AMORPHIZATION - HIGH-DOSE ION IMPLANTATION - MODIFIED MARLOWE CODE - PLANAR CHANNELING EFFECT;

D O I：

10.1143/JJAP.27.L444

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L444 / L447

页数：4

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