COMPUTER-SIMULATION ANALYSIS OF THE PLANAR CHANNELING EFFECT IN PRACTICAL ION-IMPLANTATION

被引：1
|
作者：
KIMURA, Y
KANG, HJ
SHIMIZU, R
机构：
[1] CHUNGBUK NATL UNIV,DEPT PHYS,CHEONGJU 310,SOUTH KOREA
[2] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1988年 / 27卷 / 03期
关键词：
AMORPHIZATION - HIGH-DOSE ION IMPLANTATION - MODIFIED MARLOWE CODE - PLANAR CHANNELING EFFECT;
D O I：
10.1143/JJAP.27.L444
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L444 / L447
页数：4
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