STUDY OF BORON-NITRIDE THIN-FILMS FOR ULTRAVIOLET-SENSOR APPLICATIONS

被引:4
|
作者
AHMAD, N
LICHTMAN, D
机构
[1] WICHITA STATE UNIV,DEPT ELECT ENGN,WICHITA,KS 67208
[2] UNIV WISCONSIN,DEPT PHYS,MILWAUKEE,WI 53201
[3] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201
来源
SENSORS AND ACTUATORS | 1989年 / 18卷 / 3-4期
关键词
D O I
10.1016/0250-6874(89)87045-3
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:397 / 405
页数:9
相关论文
共 50 条
  • [31] BORON-NITRIDE THIN-FILMS ON SI(100) BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION
    DEVI, GS
    ROY, S
    RAO, VJ
    SOLID STATE COMMUNICATIONS, 1993, 87 (01) : 67 - 70
  • [32] ELECTRON-OPTICAL CHARACTERIZATION OF CUBIC BORON-NITRIDE THIN-FILMS PREPARED BY REACTIVE ION PLATING
    MCKENZIE, DR
    COCKAYNE, DJH
    MULLER, DA
    MURAKAWA, M
    MIYAKE, S
    WATANABE, S
    FALLON, P
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (06) : 3007 - 3012
  • [33] THE STUDY OF THE BORON-NITRIDE THIN-LAYER STRUCTURE
    YURYEV, GS
    MAXIMOVSKIY, EA
    RUMYANTSEV, YM
    FAINER, NI
    KOSINOVA, ML
    JOURNAL DE PHYSIQUE IV, 1995, 5 (C5): : 695 - 698
  • [34] THERMODYNAMIC STUDY OF ARGON FILMS ADSORBED ON BORON-NITRIDE
    MIGONE, AD
    ALKHAFAJI, MT
    VIDALI, G
    KARIMI, M
    PHYSICAL REVIEW B, 1993, 47 (11): : 6685 - 6696
  • [35] DEPOSITIONS AND CHARACTERIZATIONS OF BORON-NITRIDE FILMS
    DOLL, GL
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1991, 202 : 94 - PHYS
  • [36] PREPARATION OF THIN HARD BORON-NITRIDE FILMS BY RF MAGNETRON SPUTTERING
    KULIKOVSKY, VY
    SHAGINYAN, LR
    VERESCHAKA, VM
    HATYNENKO, NG
    DIAMOND AND RELATED MATERIALS, 1995, 4 (02) : 113 - 119
  • [37] HOT-FILAMENT-ASSISTED ELECTRON-BEAM DEPOSITION OF CRYSTALLINE CUBIC BORON-NITRIDE THIN-FILMS
    PHANI, AR
    CHAUDHARI, GN
    MANORAMA, S
    JOURNAL OF SOLID STATE CHEMISTRY, 1995, 118 (01) : 99 - 103
  • [38] STRUCTURAL CHARACTERIZATION OF BORON-NITRIDE FILMS
    DUNCAN, TM
    LEVY, RA
    GALLAGHER, PK
    WALSH, MW
    JOURNAL OF APPLIED PHYSICS, 1988, 64 (06) : 2990 - 2994
  • [39] CUBIC BORON-NITRIDE DIAMOND FILMS
    LIAO, KJ
    WANG, WL
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1994, 145 (01): : K25 - K27
  • [40] MOLECULAR PRECURSORS TO BORON-NITRIDE THIN-FILMS .2. COADSORPTION AND REACTION OF HYDRAZINE AND DIBORANE ON RU(0001)
    TRUONG, CM
    RODRIGUEZ, JA
    GOODMAN, DW
    JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (01): : 341 - 347