STUDY OF BORON-NITRIDE THIN-FILMS FOR ULTRAVIOLET-SENSOR APPLICATIONS

被引：4
|
作者：
AHMAD, N
LICHTMAN, D
机构：
[1] WICHITA STATE UNIV,DEPT ELECT ENGN,WICHITA,KS 67208
[2] UNIV WISCONSIN,DEPT PHYS,MILWAUKEE,WI 53201
[3] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201
来源：
SENSORS AND ACTUATORS | 1989年 / 18卷 / 3-4期
关键词：
D O I：
10.1016/0250-6874(89)87045-3
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：397 / 405
页数：9
相关论文
共 50 条
  • [21] RADIO-FREQUENCY SPUTTER DEPOSITION OF BORON-NITRIDE BASED THIN-FILMS
    MITTERER, C
    RODHAMMER, P
    STORI, H
    JEGLITSCH, F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04): : 2646 - 2651
  • [22] CHARGE INSTABILITY IN MIS STRUCTURES ON SILICON WITH PECVD BORON-NITRIDE THIN-FILMS
    KORSHUNOV, AN
    KOSINOVA, ML
    SALMAN, EG
    RUMYANTSEV, YM
    FAINER, NI
    SYSOEVA, NP
    AKKERMAN, ZL
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1992, 133 (02): : K57 - K60
  • [23] DEPOSITION OF BORON-NITRIDE THIN-FILMS BY ION-BEAM ASSISTED DEPOSITION
    BRICAULT, RJ
    SIOSHANSI, P
    BUNKER, SN
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 586 - 587
  • [24] PULSE PLASMA DEPOSITION OF CUBIC BORON-NITRIDE THIN-FILMS ON SILICON SUBSTRATE
    YAN, PX
    YANG, SZ
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1994, 145 (01): : K29 - K32
  • [25] ELECTRON-SPIN-RESONANCE IN MICROCRYSTALLINE CUBIC BORON-NITRIDE AMORPHOUS HYDROGENATED BORON-NITRIDE MIXED-PHASE THIN-FILMS
    LIN, SH
    BROWN, IM
    FELDMAN, BJ
    SOLID STATE COMMUNICATIONS, 1995, 96 (06) : 421 - 425
  • [26] CHARACTERIZATION OF BORON-NITRIDE THIN-FILMS USING (ALPHA, P) NUCLEAR-REACTIONS
    GIORGINIS, G
    MISAELIDES, P
    CONTI, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4): : 100 - 103
  • [27] DEPOSITION OF CUBIC BORON-NITRIDE THIN-FILMS BY ION-BEAM-ENHANCED DEPOSITION
    TANABE, N
    HAYASHI, T
    IWAKI, M
    DIAMOND AND RELATED MATERIALS, 1992, 1 (08) : 883 - 890
  • [28] BORON-NITRIDE THIN-FILMS BY MICROWAVE ECR PLASMA CHEMICAL-VAPOR-DEPOSITION
    PAISLEY, MJ
    BOURGET, LP
    DAVIS, RF
    THIN SOLID FILMS, 1993, 235 (1-2) : 30 - 34
  • [29] PREPARATION AND CHARACTERIZATION OF CUBIC BORON-NITRIDE AND METAL BORON-NITRIDE FILMS
    GISSLER, W
    SURFACE AND INTERFACE ANALYSIS, 1994, 22 (1-12) : 139 - 148
  • [30] GROWTH OF BORON-NITRIDE THIN-FILMS BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION
    PHANI, AR
    ROY, S
    RAO, VJ
    THIN SOLID FILMS, 1995, 258 (1-2) : 21 - 25
12345