OXIDE THICKNESS MEASUREMENTS UP TO 120 A ON SILICON AND ALUMINUM USING CHEMICALLY SHIFTED AUGER-SPECTRA

被引：62

作者：

CHANG, CC ^{[1
]}

BOULIN, DM ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

SURFACE SCIENCE | 1977年 / 69卷 / 02期

关键词：

D O I：

10.1016/0039-6028(77)90122-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：385 / 402

页数：18

共 29 条

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