KINEMATICAL X-RAY-DIFFRACTION IN NONUNIFORM CRYSTALLINE FILMS - STRAIN AND DAMAGE DISTRIBUTIONS IN ION-IMPLANTED GARNETS

被引：157

作者：

SPERIOSU, VS

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 10期

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D O I：

10.1063/1.328549

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：6094 / 6103

页数：10

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