VACUUM FURNACE FOR HIGH-TEMPERATURE DIFFUSION ANNEALS

被引:2
作者
PETERSON, NL
OGILVIE, RE
机构
关键词
D O I
10.1063/1.1718309
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
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页码:193 / &
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