INFLUENCE OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING

被引：7

作者：

CHENG, YT ^{[1
]}

DOW, AA ^{[1
]}

CLEMENS, BM ^{[1
]}

CIRLIN, EH ^{[1
]}

机构：

[1] HUGHES RES LABS,MALIBU,CA 90265

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576064

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1641 / 1645

页数：5

共 41 条

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ANDERSEN, HH .

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[2]

ANDERSEN HH, 1984, ION IMPLANTATION BEA, P128

[3]

[Anonymous], 1963, KGL DANSKE VIDENSKAB

[4]

BRIGGS D, 1983, PRACTICAL SURFACE AN

[5] EFFECT OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING [J].

CHENG, YT ;

DOW, AA ;

CLEMENS, BM .

APPLIED PHYSICS LETTERS, 1988, 53 (14) :1346-1348

[6] FROM CASCADE TO SPIKE - A FRACTAL-GEOMETRY APPROACH [J].

CHENG, YT ;

NICOLET, MA ;

JOHNSON, WL .

PHYSICAL REVIEW LETTERS, 1987, 58 (20) :2083-2086

[7] INFLUENCE OF CHEMICAL DRIVING FORCES IN ION MIXING OF METALLIC BILAYERS [J].

CHENG, YT ;

VANROSSUM, M ;

NICOLET, MA ;

JOHNSON, WL .

APPLIED PHYSICS LETTERS, 1984, 45 (02) :185-187

[8]

CHENG YT, 1987, MATER RES SOC S P, V74, P419

[9] INTERDIFFUSION STUDY OF HGTE-HGCDTE SUPERLATTICE .1. LOW-TEMPERATURE AUGER SPUTTER DEPTH PROFILING [J].

CIRLIN, EH ;

IRELAND, P ;

BUCKINGHAM, S ;

WU, O .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2631-2636

[10]

CIRLIN EH, IN PRESS

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