ANOMALOUS SOLID-STATE REACTION BETWEEN SIC AND PT

被引:38
作者
CHOU, TC [1 ]
机构
[1] ENGELHARD CORP,RES & DEV,EDISON,NJ 08818
关键词
D O I
10.1557/JMR.1990.0601
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Periodic structures are generated by solid state reaction between platinum (Pt) and silicon carbide (SiC). At temperatures above 900 °C, periodic structures consisting of alternating layers of platinum silicides and carbon are produced in the diffusion zone. The composition profile across the diffusion zone and the chemistry of the periodic structures are investigated by scanning electron microscopy (SEM), scanning Auger microscopy (SAM), x-ray diffraction (XRD), and laser Raman microprobe. The formation of the platinum silicides causes an interfacial melting between Pt and SiC. X-ray diffraction indicates that Pt3Si is formed at 900 °C, while Pt2Si is formed at 1000 °C. Laser Raman spectroscopy indicates that carbon is in either an amorphous state or a highly ordered graphitic state, depending upon its location from the reaction interface. The mechanism of formation of the periodic structure is discussed in terms of the solubility of carbon in platinum silicide during the solidification process. © 1990, Materials Research Society. All rights reserved.
引用
收藏
页码:601 / 608
页数:8
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