REACTION-MECHANISMS IN THE ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH OF GAAS

被引：135

作者：

LARSEN, CA ^{[1
]}

BUCHAN, NI ^{[1
]}

STRINGFELLOW, GB ^{[1
]}

机构：

[1] UNIV UTAH,DEPT ELECT ENGN,SALT LAKE CITY,UT 84112

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 06期

关键词：

D O I：

10.1063/1.99450

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：480 / 482

页数：3

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