REACTION-MECHANISMS IN THE ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH OF GAAS

被引：135
|
作者：
LARSEN, CA [1 ]
BUCHAN, NI [1 ]
STRINGFELLOW, GB [1 ]
机构：
[1] UNIV UTAH,DEPT ELECT ENGN,SALT LAKE CITY,UT 84112
来源：
APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 06期
关键词：
D O I：
10.1063/1.99450
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：480 / 482
页数：3
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