NATURE OF DOPING INTO PURE SILICA GLASS BY PLASMA TORCH CVD

被引:32
作者
ARAI, K [1 ]
NAMIKAWA, H [1 ]
ISHII, Y [1 ]
IMAI, H [1 ]
HOSONO, H [1 ]
ABE, Y [1 ]
机构
[1] NAGOYA INST TECHNOL,DEPT INORGAN CHEM,SHOWA KU,NAGOYA,AICHI 466,JAPAN
关键词
D O I
10.1016/S0022-3093(87)80164-3
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:609 / 616
页数:8
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