MODIFICATION OF METAL SCHOTTKY CONTACTS ON SILICON BY ION-IMPLANTATION

被引：7
|
作者：
MALHERBE, JB
FRIEDLAND, E
MYBURG, G
CARR, BA
BREDELL, LJ
PAVLOVSKA, A
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 35卷 / 3-4期
关键词：
D O I：
10.1016/0168-583X(88)90278-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：247 / 252
页数：6
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