SURFACE-TOPOLOGY OF METALLIC-FILMS FABRICATED ONTO SUBSTRATES EXCITED BY SURFACE ACOUSTIC-WAVES

被引：2

作者：

TAKAHASHI, M ^{[1
]}

SAKAKIBARA, S ^{[1
]}

TSUNODA, M ^{[1
]}

SHOJI, H ^{[1
]}

WAKIYAMA, T ^{[1
]}

机构：

[1] MITSUBISHI MAT CO,SAITAMA 368,JAPAN

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1993年 / 126卷 / 1-3期

关键词：

D O I：

10.1016/0304-8853(93)90546-E

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Cu films were evaporated onto substrates excited by SAWs under various amplitude conditions. Based on the AFM images of films and the propagation properties of SAWs, it was concluded that SAWs influence the growth mode of films and provides in-situ information on initial film growth.

引用

页码：62 / 64

页数：3