STUDY OF DEFECTS IN DIAMOND FILMS WITH ELECTRON-PARAMAGNETIC RESONANCE MEASUREMENTS

被引:16
作者
FANCIULLI, M
MOUSTAKAS, TD
机构
[1] BOSTON UNIV, DEPT PHYS, BOSTON, MA 02215 USA
[2] BOSTON UNIV, DEPT ELECT COMP & SYST ENGN, BOSTON, MA 02215 USA
基金
美国国家科学基金会;
关键词
D O I
10.1016/0925-9635(92)90099-A
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Defects in diamond thin films, deposited by the filament-assisted chemical vapor deposition process, were studied with electron spin resonance measurements. Depending on growth conditions the films exhibit electron paramagnetic resonance signals with g values of 2.0028 and 2.0019, peak-to-peak linewidths of 4-5 G and spin densities from 1017 to 1019 spins cm-3. These findings are discussed with a new theory, which predicts that certain defects can thermodynamically stabilize diamond over graphite. © 1992.
引用
收藏
页码:773 / 775
页数:3
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