USING A STRAIGHTNESS REFERENCE IN OBTAINING MORE ACCURATE SURFACE PROFILES FROM A LONG TRACE PROFILER

被引：53

作者：

IRICK, SC

MCKINNEY, WR

LUNT, DLJ

TAKACS, PZ

机构：

[1] TUCSON OPT RES CORP,TUCSON,AZ 85719

[2] BROOKHAVEN NATL LAB,DIV INSTRUMENTAT,UPTON,NY 11973

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1143036

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The long trace profiler (Takacs et al.) has found significant applications in measuring the surfaces of synchrotron optics. However, requirements of small slope errors at all spatial wavelengths of the synchrotron optics mandate more accurate slope measurements. A straightness reference for the long trace profiler greatly increases the accuracy of the instrument. Methods of using the straightness reference by interpreting the sequential interference patterns are discussed and results of measurements are presented.

引用

页码：1436 / 1438

页数：3

共 6 条

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CHURCH, EL ;

TAKACS, PZ .

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[3]

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[4]

Takacs P. Z., 1989, USA Patent, Patent No. [4,884,697, 4884697]

[5]

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[6]

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