GRAPHITE FORMATION IN DIAMOND FILM DEPOSITION

被引：133
作者：
ZHU, W
RANDALL, CA
BADZIAN, AR
MESSIER, R
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词：
D O I：
10.1116/1.575935
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2315 / 2324
页数：10
相关论文
共 23 条
[1]  
Badzian A., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V683, P127, DOI 10.1117/12.936428
[2]   CRYSTALLIZATION OF DIAMOND CRYSTALS AND FILMS BY MICROWAVE ASSISTED CVD .2. [J].
BADZIAN, AR ;
BADZIAN, T ;
ROY, R ;
MESSIER, R ;
SPEAR, KE .
MATERIALS RESEARCH BULLETIN, 1988, 23 (04) :531-548
[3]  
BADZIAN AR, 1987, ADV XRAY ANAL, V31, P113
[4]  
BADZIAN AR, UNPUB
[5]  
BERMAN R, 1965, PHYSICAL PROPERTIES, P5
[6]  
Evans T., 1979, PROPERTIES DIAMOND, P403
[7]  
EVANS T, 1961, PHILOS MAG, V6, P1129
[8]   GROWTH-MECHANISM OF VAPOR-DEPOSITED DIAMOND [J].
FRENKLACH, M ;
SPEAR, KE .
JOURNAL OF MATERIALS RESEARCH, 1988, 3 (01) :133-140
[9]   GRAPHITIZATION OF THIN CARBON-FILMS [J].
GOMA, J ;
OBERLIN, M .
THIN SOLID FILMS, 1980, 65 (02) :221-232
[10]  
GONZALEZHERNAND.J, 1986, J VAC SCI TECHNOL A, V6, P83
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