LONGITUDINAL DISCHARGE XECL EXCIMER LASER WITH AUTOMATIC UV PREIONIZATION

被引：7
|
作者：
FURUHASHI, H
HIRAMATSU, M
GOTO, T
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 14期
关键词：
D O I：
10.1063/1.98021
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：883 / 885
页数：3
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