TOTAL-REFLECTION X-RAY-FLUORESCENCE SPECTROSCOPY FOR IN-SITU, REAL-TIME ANALYSIS OF GROWING FILMS

被引:7
作者
ROBERTS, TA
GRAY, KE
机构
[1] ARGONNE NATL LAB,DIV MAT SCI,ARGONNE,IL 60439
[2] CTR NAVAL ANAL,ALEXANDRIA,VA
关键词
D O I
10.1557/S0883769400044882
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:43 / 46
页数:4
相关论文
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