MEASUREMENTS OF THERMAL-CONDUCTIVITY OF DIAMOND FILMS BY PHOTOTHERMAL DEFLECTION TECHNIQUE

The photothermal deflection technique has been used for contactless measurements of the thermal conductivity of thin polycrystalline diamond films grown in a dc arc discharge in different CH4/H-2 mixtures. The thermal conductivity correlates inversely with amorphous sp2 carbon content in the films. Values of thermal conductivity in the range 2-5 W/cm K were obtained for approximately 10-mum-thick diamond films deposited from gas mixtures containing methane percentages varying from 3% to 9%.