MEASUREMENTS OF THERMAL-CONDUCTIVITY OF DIAMOND FILMS BY PHOTOTHERMAL DEFLECTION TECHNIQUE

被引：35

作者：

BERTOLOTTI, M

LIAKHOU, GL

FERRARI, A

RALCHENKO, VGF

SMOLIN, AA

OBRAZTSOVA, E

KOROTOUSHENKO, KG

PIMENOV, SM

KONOV, VI

机构：

[1] TECH UNIV MOLDOVA,KISHINEV 277012,MOLDOVA

[2] UNIV ROMA LA SAPIENZA,DIPARTIMENTO ELETTRON,I-00185 ROME,ITALY

[3] RUSSIAN ACAD SCI,INST GEN PHYS,MOSCOW 117942,RUSSIA

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 75卷 / 12期

关键词：

D O I：

10.1063/1.356585

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The photothermal deflection technique has been used for contactless measurements of the thermal conductivity of thin polycrystalline diamond films grown in a dc arc discharge in different CH4/H-2 mixtures. The thermal conductivity correlates inversely with amorphous sp2 carbon content in the films. Values of thermal conductivity in the range 2-5 W/cm K were obtained for approximately 10-mum-thick diamond films deposited from gas mixtures containing methane percentages varying from 3% to 9%.

引用

页码：7795 / 7798

页数：4

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