INEXPENSIVE SPOT-PROFILE ANALYSIS REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION

被引：1
|
作者：
IDZERDA, Y
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 06期
关键词：
D O I：
10.1116/1.578464
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A simple, photomultiplier based spot-profile analysis reflection high energy electron diffraction (SPARHEED) apparatus is described. A micrometer scanned, two pinhole aperture is coupled to an optical fiber and yields 38 mum spot-profile intensity resolution of RHEED patterns corresponding to an ultimate spatial resolution of approximately 4000 angstrom along the RHEED pattern and 900 A across the RHEED pattern. Long range scanning also allows for surface lattice net determination. Acquisition of selected RHEED intensity oscillations is straightforward. The device is easily mounted, rigid, and inexpensive.
引用
收藏
页码：3138 / 3140
页数：3
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