OPTICAL CHARACTERIZATION OF SPUTTERED CARBON-FILMS

被引：38

作者：

AGER, JW

机构：

[1] Center for Advanced Materials, Lawrence Berkeley Laboratory, University of California, Berkeley

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 01期

关键词：

D O I：

10.1109/20.195579

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sputtered carbon films are widely used as protective overcoats for thin film disk media. Raman spectroscopy is nondestructive and relatively rapid and is well suited for the characterization of carbon films. Specific features in the Raman spectra are empirically correlated with the rates of specific types of mechanical wear for both hydrogenated and unhydrogenated films. This observation is interpreted in terms of a random covalent network, in which the mechanical performance of the film is determined by the nature of the bonding that links sp2-bonded domains.

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页码：259 / 263

页数：5

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