KINETICS OF HYDROGEN ADSORPTION AND ABSORPTION - CATALYTIC GATE MIS GAS SENSORS ON SILICON

被引：23
作者：
HUGHES, RC
TAYLOR, PA
RICCO, AJ
RYE, RR
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 09期
关键词：
D O I：
10.1149/1.2097536
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：2653 / 2661
页数：9
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共 21 条
[1]  
ADAMSON AW, 1982, PHYSICAL CHEM SURFAC, P521
[2]  
AUER W, 1974, BER BUNSEN PHYS CHEM, V78, P58
[3]   A HYDROGEN PLASMA DIAGNOSTIC BASED ON PD METAL-OXIDE-SEMICONDUCTOR DIODES [J].
BASTASZ, R ;
HUGHES, RC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :629-630
[4]   EVIDENCE FOR SUBSURFACE HYDROGEN ON PD(110) - AN INTERMEDIATE BETWEEN CHEMISORBED AND DISSOLVED SPECIES [J].
BEHM, RJ ;
PENKA, V ;
CATTANIA, MG ;
CHRISTMANN, K ;
ERTL, G .
JOURNAL OF CHEMICAL PHYSICS, 1983, 78 (12) :7486-7490
[5]   ADSORPTION OF HYDROGEN ON PD(100) [J].
BEHM, RJ ;
CHRISTMANN, K ;
ERTL, G .
SURFACE SCIENCE, 1980, 99 (02) :320-340
[6]  
CHANG SC, 1986, ACS SYM SER, V309, P58
[7]   SURFACE EFFECTS ON THE KINETICS OF HYDROGEN ABSORPTION BY METALS [J].
DAVENPORT, JW ;
DIENES, GJ ;
JOHNSON, RA .
PHYSICAL REVIEW B, 1982, 25 (04) :2165-2174
[8]   THIN-FILM PALLADIUM AND SILVER ALLOYS AND LAYERS FOR METAL-INSULATOR-SEMICONDUCTOR SENSORS [J].
HUGHES, RC ;
SCHUBERT, WK ;
ZIPPERIAN, TE ;
RODRIGUEZ, JL ;
PLUT, TA .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) :1074-1083
[9]   KINETICS OF HYDROGEN ABSORPTION BY PD(110) [J].
KAY, BD ;
PEDEN, CHF ;
GOODMAN, DW .
PHYSICAL REVIEW B, 1986, 34 (02) :817-821
[10]  
KERMATI B, 1982, J APPL PHYS, V53, P1091
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