CHEMICAL VAPOR-DEPOSITION OF UNDOPED AND SPINEL-DOPED CUBIC ZIRCONIA FILM USING ORGANOMETALLIC PROCESS

被引:59
作者
TAKAHASHI, Y
KAWAE, T
NASU, M
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关键词
D O I
10.1016/0022-0248(86)90132-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:409 / 415
页数:7
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共 24 条
[1]   THIN-FILMS OF METAL-OXIDES ON SILICON BY CHEMICAL VAPOR-DEPOSITION WITH ORGANOMETALLIC COMPOUNDS .1. [J].
BALOG, M ;
SCHIEBER, M ;
MICHMAN, M ;
PATAI, S .
JOURNAL OF CRYSTAL GROWTH, 1972, 17 (DEC) :298-&
[2]   CHARACTERISTICS OF GROWTH OF FILMS OF ZIRCONIUM AND HAFNIUM OXIDES (ZRO2, HFO2) BY THERMAL-DECOMPOSITION OF ZIRCONIUM AND HAFNIUM BETA-DIKETONATE COMPLEXES IN THE PRESENCE AND ABSENCE OF OXYGEN [J].
BALOG, M ;
SCHIEBER, M ;
MICHMAN, M ;
PATAI, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (07) :1203-1207
[3]  
Bradley D. C., 1978, METAL ALKOXIDES
[4]  
BRENNFLECK K, 1981, 8TH P INT C CVD, P672
[5]   EPITAXIAL GARNET-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION [J].
COWHER, ME ;
SEDGWICK, TO ;
LANDERMANN, J .
JOURNAL OF ELECTRONIC MATERIALS, 1974, 3 (03) :621-633
[6]   LOW-TEMPERATURE CVD GARNET GROWTH [J].
COWHER, ME ;
SEDGWICK, TO .
JOURNAL OF CRYSTAL GROWTH, 1979, 46 (03) :399-402
[7]   STABILIZATION OF TETRAGONAL STRUCTURE IN ZIRCONIA MICROCRYSTALS [J].
GARVIE, RC .
JOURNAL OF PHYSICAL CHEMISTRY, 1978, 82 (02) :218-224
[8]   OCCURRENCE OF METASTABLE TETRAGONAL ZIRCONIA AS A CRYSTALLITE SIZE EFFECT [J].
GARVIE, RC .
JOURNAL OF PHYSICAL CHEMISTRY, 1965, 69 (04) :1238-&
[9]   MGO FILMS DEPOSITED BY CHEMICAL VAPOR-DEPOSITION [J].
KAMATA, K ;
SHIBATA, Y ;
KISHI, Y .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1984, 3 (05) :423-426
[10]   NATURE AND THERMAL EVOLUTION OF AMORPHOUS HYDRATED ZIRCONIUM OXIDE [J].
LIVAGE, J ;
DOI, K ;
MAZIERES, C .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1968, 51 (06) :349-+