MODIFIED RELATIVE SENSITIVITY FACTORS FOR AUGER-SPECTRA

The quantitative evaluation method of Auger electron energy spectra using the relative sensitivity factors of pure materials is widely used for complex multicomponent samples. Nevertheless, the traditional ''relative sensitivity factors'' method leaves matrix effects out of consideration. In the present work new, modified values of the relative sensitivity factors can be calculated for the most common elements in different matrices. In this new method the most important matrix effects are taken into consideration, namely the electron inelastic mean free path and the backscattering factor.