OPTICAL-CONSTANTS OF SILICON FILMS DEPOSITED BY THE R.F. GLOW-DISCHARGE OF SICL4

被引：15
作者：
AUGELLI, V
MURRI, R
SCHIAVULLI, L
BRUNO, G
CAPEZZUTO, P
CRAMAROSSA, F
EVANGELISTI, F
FORTUNATO, G
机构：
[1] UNIV BARI,IST CHIM GEN & INORGAN,CNR,CTR STUDIO CHIM PLASMI,I-70124 BARI,ITALY
[2] UNIV ROME,IST FIS,CNR,NAZIONALE STRUTTURA MAT GRP,I-00100 ROME,ITALY
来源：
THIN SOLID FILMS | 1981年 / 86卷 / 04期
关键词：
D O I：
10.1016/0040-6090(81)90344-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：359 / 367
页数：9
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