OXYGENATION OF YBA2CU3OX THIN-FILMS AND MULTILAYERS

被引:2
作者
HUMPHREYS, RG
CHEW, NG
EDWARDS, JA
SATCHELL, JS
GOODYEAR, SW
BLENKINSOP, SE
机构
[1] Royal Signals and Radar Establ., Malvern
关键词
D O I
10.1088/0953-2048/4/1S/043
中图分类号
O59 [应用物理学];
学科分类号
摘要
The oxygen requirements for the successful growth of YBa2Cu3O7 thin films have been studied. Good quality films can be produced at much lower pressures than suggested by the data of Bormann and Nolting. The main benefit from the use of atomic oxygen is during cooling after growth rather than during growth itself. Epitaxial Y2O3 overlayers inhibit oxygen diffusion into smooth YBa2Cu3O(x) films.
引用
收藏
页码:S172 / S174
页数:3
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