COMPLETELY BISUBSTITUTED IRON-GARNET (BIG) FILMS PREPARED BY ELECTRON-CYCLOTRON RESONANCE (ECR) SPUTTERING

被引：26
作者：
MINO, S
MATSUOKA, M
TATE, A
SHIBUKAWA, A
ONO, K
机构：
[1] NTT, Opto-electronics Laboratories, Tokai, Ibaraki
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1992年 / 31卷 / 6A期
关键词：
MAGNETOOPTICS; BISMUTH; ECR SPUTTERING; OPTICAL ISOLATOR; GARNET FILM; FARADAY ROTATION; MAGNETIC ANISOTROPY; CRYSTALLINITY;
D O I：
10.1143/JJAP.31.1786
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Completely Bi-substituted iron garnet (BIG) films were epitaxially synthesized on garnet substrates by electron cyclotron resonance (ECR) sputtering. The critical temperature for the epitaxial growth, crystallinities, and Faraday rotation theta(F) of BIG films depend on the O2 gas flow rate. With an optimum flow rate of 7 sccm, single-crystal BIG films were obtained at temperatures above 390-degrees-C, and theta(F) achieved its largest value of 8.4 x 10(4) deg/cm (lambda = 0.633-mu-m). The minimum ferromagnetic resonance (FMR) linewidth DELTA-H was 70 Oe; this is the smallest value ever reported. The uniaxial perpendicular magnetic anisotropy is mainly caused by the elastic deformation induced by the thermal expansion mismatch between the film and the substrate.
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页码：1786 / 1792
页数：7
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