SYNTHESIS AND CHARACTERIZATION OF POSITIVE PHOTOSENSITIVE POLYIMIDE PRECURSORS

被引：22

作者：

KUBOTA, S

YAMAWAKI, Y

MORIWAKI, T

ETO, S

机构：

来源：

POLYMER ENGINEERING AND SCIENCE | 1989年 / 29卷 / 14期

关键词：

D O I：

10.1002/pen.760291413

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

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页码：950 / 953

页数：4

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